Dynamic Characterization of Microcantilevers with a Shock Wave Excitation Method under High Temperature

1290 Ogledov
1096 Prenosov
Izvoz citacije: ABNT
SHE, Dongsheng ;YANG, Yiliu ;WEI, Zefei ;YU, Zhen .
Dynamic Characterization of Microcantilevers with a Shock Wave Excitation Method under High Temperature. 
Strojniški vestnik - Journal of Mechanical Engineering, [S.l.], v. 62, n.9, p. 534-542, june 2018. 
ISSN 0039-2480.
Available at: <https://www.sv-jme.eu/sl/article/dynamic-characterization-of-microcantilevers-with-a-shock-wave-excitation-method-under-high-temperature/>. Date accessed: 21 sep. 2021. 
doi:http://dx.doi.org/10.5545/sv-jme.2015.3071.
She, D., Yang, Y., Wei, Z., & Yu, Z.
(2016).
Dynamic Characterization of Microcantilevers with a Shock Wave Excitation Method under High Temperature.
Strojniški vestnik - Journal of Mechanical Engineering, 62(9), 534-542.
doi:http://dx.doi.org/10.5545/sv-jme.2015.3071
@article{sv-jmesv-jme.2015.3071,
	author = {Dongsheng  She and Yiliu  Yang and Zefei  Wei and Zhen  Yu},
	title = {Dynamic Characterization of Microcantilevers with a Shock Wave Excitation Method under High Temperature},
	journal = {Strojniški vestnik - Journal of Mechanical Engineering},
	volume = {62},
	number = {9},
	year = {2016},
	keywords = {dynamic characteristics testing; microcantilever; shock wave; temperature coefficient of natural frequency; high temperature},
	abstract = {Aiming at the dynamic characteristics of silicon microcantilevers under a high-temperature environment, a shock wave excitation method was proposed, and a dynamic testing system with high-temperature loading unit for MEMS microstructures was established. In the system, the shock wave generated by electrical discharging was used to excite the testing microcantilever. The vibration response signals were acquired by laser Doppler vibrometer system. A T-shaped microcantilever and a microcantilever with uniform rectangular crossing section were fabricated and tested under the high-temperature environment ranging from 299 K to 773 K. Their temperature coefficients of natural frequency were obtained. The results show that for both two microcantilevers, the temperature coefficients of the natural frequency is very close to each other, which is only decided by the temperature coefficient of the elastic modulus and the linear thermal expansion coefficients.},
	issn = {0039-2480},	pages = {534-542},	doi = {10.5545/sv-jme.2015.3071},
	url = {https://www.sv-jme.eu/sl/article/dynamic-characterization-of-microcantilevers-with-a-shock-wave-excitation-method-under-high-temperature/}
}
She, D.,Yang, Y.,Wei, Z.,Yu, Z.
2016 June 62. Dynamic Characterization of Microcantilevers with a Shock Wave Excitation Method under High Temperature. Strojniški vestnik - Journal of Mechanical Engineering. [Online] 62:9
%A She, Dongsheng 
%A Yang, Yiliu 
%A Wei, Zefei 
%A Yu, Zhen 
%D 2016
%T Dynamic Characterization of Microcantilevers with a Shock Wave Excitation Method under High Temperature
%B 2016
%9 dynamic characteristics testing; microcantilever; shock wave; temperature coefficient of natural frequency; high temperature
%! Dynamic Characterization of Microcantilevers with a Shock Wave Excitation Method under High Temperature
%K dynamic characteristics testing; microcantilever; shock wave; temperature coefficient of natural frequency; high temperature
%X Aiming at the dynamic characteristics of silicon microcantilevers under a high-temperature environment, a shock wave excitation method was proposed, and a dynamic testing system with high-temperature loading unit for MEMS microstructures was established. In the system, the shock wave generated by electrical discharging was used to excite the testing microcantilever. The vibration response signals were acquired by laser Doppler vibrometer system. A T-shaped microcantilever and a microcantilever with uniform rectangular crossing section were fabricated and tested under the high-temperature environment ranging from 299 K to 773 K. Their temperature coefficients of natural frequency were obtained. The results show that for both two microcantilevers, the temperature coefficients of the natural frequency is very close to each other, which is only decided by the temperature coefficient of the elastic modulus and the linear thermal expansion coefficients.
%U https://www.sv-jme.eu/sl/article/dynamic-characterization-of-microcantilevers-with-a-shock-wave-excitation-method-under-high-temperature/
%0 Journal Article
%R 10.5545/sv-jme.2015.3071
%& 534
%P 9
%J Strojniški vestnik - Journal of Mechanical Engineering
%V 62
%N 9
%@ 0039-2480
%8 2018-06-27
%7 2018-06-27
She, Dongsheng, Yiliu  Yang, Zefei  Wei, & Zhen  Yu.
"Dynamic Characterization of Microcantilevers with a Shock Wave Excitation Method under High Temperature." Strojniški vestnik - Journal of Mechanical Engineering [Online], 62.9 (2016): 534-542. Web.  21 Sep. 2021
TY  - JOUR
AU  - She, Dongsheng 
AU  - Yang, Yiliu 
AU  - Wei, Zefei 
AU  - Yu, Zhen 
PY  - 2016
TI  - Dynamic Characterization of Microcantilevers with a Shock Wave Excitation Method under High Temperature
JF  - Strojniški vestnik - Journal of Mechanical Engineering
DO  - 10.5545/sv-jme.2015.3071
KW  - dynamic characteristics testing; microcantilever; shock wave; temperature coefficient of natural frequency; high temperature
N2  - Aiming at the dynamic characteristics of silicon microcantilevers under a high-temperature environment, a shock wave excitation method was proposed, and a dynamic testing system with high-temperature loading unit for MEMS microstructures was established. In the system, the shock wave generated by electrical discharging was used to excite the testing microcantilever. The vibration response signals were acquired by laser Doppler vibrometer system. A T-shaped microcantilever and a microcantilever with uniform rectangular crossing section were fabricated and tested under the high-temperature environment ranging from 299 K to 773 K. Their temperature coefficients of natural frequency were obtained. The results show that for both two microcantilevers, the temperature coefficients of the natural frequency is very close to each other, which is only decided by the temperature coefficient of the elastic modulus and the linear thermal expansion coefficients.
UR  - https://www.sv-jme.eu/sl/article/dynamic-characterization-of-microcantilevers-with-a-shock-wave-excitation-method-under-high-temperature/
@article{{sv-jme}{sv-jme.2015.3071},
	author = {She, D., Yang, Y., Wei, Z., Yu, Z.},
	title = {Dynamic Characterization of Microcantilevers with a Shock Wave Excitation Method under High Temperature},
	journal = {Strojniški vestnik - Journal of Mechanical Engineering},
	volume = {62},
	number = {9},
	year = {2016},
	doi = {10.5545/sv-jme.2015.3071},
	url = {https://www.sv-jme.eu/sl/article/dynamic-characterization-of-microcantilevers-with-a-shock-wave-excitation-method-under-high-temperature/}
}
TY  - JOUR
AU  - She, Dongsheng 
AU  - Yang, Yiliu 
AU  - Wei, Zefei 
AU  - Yu, Zhen 
PY  - 2018/06/27
TI  - Dynamic Characterization of Microcantilevers with a Shock Wave Excitation Method under High Temperature
JF  - Strojniški vestnik - Journal of Mechanical Engineering; Vol 62, No 9 (2016): Strojniški vestnik - Journal of Mechanical Engineering
DO  - 10.5545/sv-jme.2015.3071
KW  - dynamic characteristics testing, microcantilever, shock wave, temperature coefficient of natural frequency, high temperature
N2  - Aiming at the dynamic characteristics of silicon microcantilevers under a high-temperature environment, a shock wave excitation method was proposed, and a dynamic testing system with high-temperature loading unit for MEMS microstructures was established. In the system, the shock wave generated by electrical discharging was used to excite the testing microcantilever. The vibration response signals were acquired by laser Doppler vibrometer system. A T-shaped microcantilever and a microcantilever with uniform rectangular crossing section were fabricated and tested under the high-temperature environment ranging from 299 K to 773 K. Their temperature coefficients of natural frequency were obtained. The results show that for both two microcantilevers, the temperature coefficients of the natural frequency is very close to each other, which is only decided by the temperature coefficient of the elastic modulus and the linear thermal expansion coefficients.
UR  - https://www.sv-jme.eu/sl/article/dynamic-characterization-of-microcantilevers-with-a-shock-wave-excitation-method-under-high-temperature/
She, Dongsheng, Yang, Yiliu, Wei, Zefei, AND Yu, Zhen.
"Dynamic Characterization of Microcantilevers with a Shock Wave Excitation Method under High Temperature" Strojniški vestnik - Journal of Mechanical Engineering [Online], Volume 62 Number 9 (27 June 2018)

Avtorji

Inštitucije

  • Bohai University, College of Engineering, China 1
  • Bohai University, Research and Teaching Institute of College Computer Science, China 2

Informacije o papirju

Strojniški vestnik - Journal of Mechanical Engineering 62(2016)9, 534-542

https://doi.org/10.5545/sv-jme.2015.3071

Aiming at the dynamic characteristics of silicon microcantilevers under a high-temperature environment, a shock wave excitation method was proposed, and a dynamic testing system with high-temperature loading unit for MEMS microstructures was established. In the system, the shock wave generated by electrical discharging was used to excite the testing microcantilever. The vibration response signals were acquired by laser Doppler vibrometer system. A T-shaped microcantilever and a microcantilever with uniform rectangular crossing section were fabricated and tested under the high-temperature environment ranging from 299 K to 773 K. Their temperature coefficients of natural frequency were obtained. The results show that for both two microcantilevers, the temperature coefficients of the natural frequency is very close to each other, which is only decided by the temperature coefficient of the elastic modulus and the linear thermal expansion coefficients.

dynamic characteristics testing; microcantilever; shock wave; temperature coefficient of natural frequency; high temperature