Focus Variation – a Robust Technology for High Resolution Optical 3D Surface Metrology

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DANZL, Reinhard ;HELMLI, Franz ;SCHERER, Stefan .
Focus Variation – a Robust Technology for High Resolution Optical 3D Surface Metrology. 
Strojniški vestnik - Journal of Mechanical Engineering, [S.l.], v. 57, n.3, p. 245-256, june 2018. 
ISSN 0039-2480.
Available at: <https://www.sv-jme.eu/sl/article/focus-variation-a-robust-technology-for-high-resolution-optical-3d-surface-metrology/>. Date accessed: 19 jan. 2021. 
doi:http://dx.doi.org/10.5545/sv-jme.2010.175.
Danzl, R., Helmli, F., & Scherer, S.
(2011).
Focus Variation – a Robust Technology for High Resolution Optical 3D Surface Metrology.
Strojniški vestnik - Journal of Mechanical Engineering, 57(3), 245-256.
doi:http://dx.doi.org/10.5545/sv-jme.2010.175
@article{sv-jmesv-jme.2010.175,
	author = {Reinhard  Danzl and Franz  Helmli and Stefan  Scherer},
	title = {Focus Variation – a Robust Technology for High Resolution Optical 3D Surface Metrology},
	journal = {Strojniški vestnik - Journal of Mechanical Engineering},
	volume = {57},
	number = {3},
	year = {2011},
	keywords = {metrology; 3D; optical; focus variation; measurement; roughness; form; accuracy; comparison; tactile},
	abstract = {This article describes and evaluates the focus variation method, an optical 3D measurement technique. The goal is to analyse the performance of the method on a series of typical measurement tasks including roughness measurements, form and wear measurements. First, a comparison of roughness measurements between the proposed method and a tactile device on a newly developed roughness standard is made. Results show that both systems deliver Ra values that are comparable to each other with differences of a few nanometers. Afterwards form measurements are performed on a calibration standard with hemi-spherical calottes, showing a repeatability of sphere measurements < 100 nm. Finally, two typical engineering applications are provided. The first is wear measurement of cutting tools, the second the inspection and classification of welding spots. Both applications demonstrate the ability },
	issn = {0039-2480},	pages = {245-256},	doi = {10.5545/sv-jme.2010.175},
	url = {https://www.sv-jme.eu/sl/article/focus-variation-a-robust-technology-for-high-resolution-optical-3d-surface-metrology/}
}
Danzl, R.,Helmli, F.,Scherer, S.
2011 June 57. Focus Variation – a Robust Technology for High Resolution Optical 3D Surface Metrology. Strojniški vestnik - Journal of Mechanical Engineering. [Online] 57:3
%A Danzl, Reinhard 
%A Helmli, Franz 
%A Scherer, Stefan 
%D 2011
%T Focus Variation – a Robust Technology for High Resolution Optical 3D Surface Metrology
%B 2011
%9 metrology; 3D; optical; focus variation; measurement; roughness; form; accuracy; comparison; tactile
%! Focus Variation – a Robust Technology for High Resolution Optical 3D Surface Metrology
%K metrology; 3D; optical; focus variation; measurement; roughness; form; accuracy; comparison; tactile
%X This article describes and evaluates the focus variation method, an optical 3D measurement technique. The goal is to analyse the performance of the method on a series of typical measurement tasks including roughness measurements, form and wear measurements. First, a comparison of roughness measurements between the proposed method and a tactile device on a newly developed roughness standard is made. Results show that both systems deliver Ra values that are comparable to each other with differences of a few nanometers. Afterwards form measurements are performed on a calibration standard with hemi-spherical calottes, showing a repeatability of sphere measurements < 100 nm. Finally, two typical engineering applications are provided. The first is wear measurement of cutting tools, the second the inspection and classification of welding spots. Both applications demonstrate the ability 
%U https://www.sv-jme.eu/sl/article/focus-variation-a-robust-technology-for-high-resolution-optical-3d-surface-metrology/
%0 Journal Article
%R 10.5545/sv-jme.2010.175
%& 245
%P 12
%J Strojniški vestnik - Journal of Mechanical Engineering
%V 57
%N 3
%@ 0039-2480
%8 2018-06-29
%7 2018-06-29
Danzl, Reinhard, Franz  Helmli, & Stefan  Scherer.
"Focus Variation – a Robust Technology for High Resolution Optical 3D Surface Metrology." Strojniški vestnik - Journal of Mechanical Engineering [Online], 57.3 (2011): 245-256. Web.  19 Jan. 2021
TY  - JOUR
AU  - Danzl, Reinhard 
AU  - Helmli, Franz 
AU  - Scherer, Stefan 
PY  - 2011
TI  - Focus Variation – a Robust Technology for High Resolution Optical 3D Surface Metrology
JF  - Strojniški vestnik - Journal of Mechanical Engineering
DO  - 10.5545/sv-jme.2010.175
KW  - metrology; 3D; optical; focus variation; measurement; roughness; form; accuracy; comparison; tactile
N2  - This article describes and evaluates the focus variation method, an optical 3D measurement technique. The goal is to analyse the performance of the method on a series of typical measurement tasks including roughness measurements, form and wear measurements. First, a comparison of roughness measurements between the proposed method and a tactile device on a newly developed roughness standard is made. Results show that both systems deliver Ra values that are comparable to each other with differences of a few nanometers. Afterwards form measurements are performed on a calibration standard with hemi-spherical calottes, showing a repeatability of sphere measurements < 100 nm. Finally, two typical engineering applications are provided. The first is wear measurement of cutting tools, the second the inspection and classification of welding spots. Both applications demonstrate the ability 
UR  - https://www.sv-jme.eu/sl/article/focus-variation-a-robust-technology-for-high-resolution-optical-3d-surface-metrology/
@article{{sv-jme}{sv-jme.2010.175},
	author = {Danzl, R., Helmli, F., Scherer, S.},
	title = {Focus Variation – a Robust Technology for High Resolution Optical 3D Surface Metrology},
	journal = {Strojniški vestnik - Journal of Mechanical Engineering},
	volume = {57},
	number = {3},
	year = {2011},
	doi = {10.5545/sv-jme.2010.175},
	url = {https://www.sv-jme.eu/sl/article/focus-variation-a-robust-technology-for-high-resolution-optical-3d-surface-metrology/}
}
TY  - JOUR
AU  - Danzl, Reinhard 
AU  - Helmli, Franz 
AU  - Scherer, Stefan 
PY  - 2018/06/29
TI  - Focus Variation – a Robust Technology for High Resolution Optical 3D Surface Metrology
JF  - Strojniški vestnik - Journal of Mechanical Engineering; Vol 57, No 3 (2011): Strojniški vestnik - Journal of Mechanical Engineering
DO  - 10.5545/sv-jme.2010.175
KW  - metrology, 3D, optical, focus variation, measurement, roughness, form, accuracy, comparison, tactile
N2  - This article describes and evaluates the focus variation method, an optical 3D measurement technique. The goal is to analyse the performance of the method on a series of typical measurement tasks including roughness measurements, form and wear measurements. First, a comparison of roughness measurements between the proposed method and a tactile device on a newly developed roughness standard is made. Results show that both systems deliver Ra values that are comparable to each other with differences of a few nanometers. Afterwards form measurements are performed on a calibration standard with hemi-spherical calottes, showing a repeatability of sphere measurements < 100 nm. Finally, two typical engineering applications are provided. The first is wear measurement of cutting tools, the second the inspection and classification of welding spots. Both applications demonstrate the ability 
UR  - https://www.sv-jme.eu/sl/article/focus-variation-a-robust-technology-for-high-resolution-optical-3d-surface-metrology/
Danzl, Reinhard, Helmli, Franz, AND Scherer, Stefan.
"Focus Variation – a Robust Technology for High Resolution Optical 3D Surface Metrology" Strojniški vestnik - Journal of Mechanical Engineering [Online], Volume 57 Number 3 (29 June 2018)

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Informacije o papirju

Strojniški vestnik - Journal of Mechanical Engineering 57(2011)3, 245-256

https://doi.org/10.5545/sv-jme.2010.175

This article describes and evaluates the focus variation method, an optical 3D measurement technique. The goal is to analyse the performance of the method on a series of typical measurement tasks including roughness measurements, form and wear measurements. First, a comparison of roughness measurements between the proposed method and a tactile device on a newly developed roughness standard is made. Results show that both systems deliver Ra values that are comparable to each other with differences of a few nanometers. Afterwards form measurements are performed on a calibration standard with hemi-spherical calottes, showing a repeatability of sphere measurements < 100 nm. Finally, two typical engineering applications are provided. The first is wear measurement of cutting tools, the second the inspection and classification of welding spots. Both applications demonstrate the ability

metrology; 3D; optical; focus variation; measurement; roughness; form; accuracy; comparison; tactile