Theoretical Analysis of Stiffness Constant and Effective Mass for a Round-Folded Beam in MEMS Accelerometer

1909 Ogledov
2263 Prenosov
Izvoz citacije: ABNT
WONG, Wai Chi ;AZID, Ishak Abdul ;YEOP MAJLIS, Burhanuddin .
Theoretical Analysis of Stiffness Constant and Effective Mass for a Round-Folded Beam in MEMS Accelerometer. 
Strojniški vestnik - Journal of Mechanical Engineering, [S.l.], v. 57, n.6, p. 517-525, june 2018. 
ISSN 0039-2480.
Available at: <https://www.sv-jme.eu/sl/article/theoretical-analysis-of-stiffness-constant-and-effective-mass-for-a-round-folded-beam-in-mems-accelerometer/>. Date accessed: 02 dec. 2022. 
doi:http://dx.doi.org/10.5545/sv-jme.2009.151.
Wong, W., Azid, I., & Yeop Majlis, B.
(2011).
Theoretical Analysis of Stiffness Constant and Effective Mass for a Round-Folded Beam in MEMS Accelerometer.
Strojniški vestnik - Journal of Mechanical Engineering, 57(6), 517-525.
doi:http://dx.doi.org/10.5545/sv-jme.2009.151
@article{sv-jmesv-jme.2009.151,
	author = {Wai Chi  Wong and Ishak Abdul  Azid and Burhanuddin  Yeop Majlis},
	title = {Theoretical Analysis of Stiffness Constant and Effective Mass for a Round-Folded Beam in MEMS Accelerometer},
	journal = {Strojniški vestnik - Journal of Mechanical Engineering},
	volume = {57},
	number = {6},
	year = {2011},
	keywords = {effective mass; folded beam; MEMS-accelerometer; stiffness constant; strain energy},
	abstract = {In this paper, the governing equations of stiffness constant and effective mass for a round folded suspension beam in Micro-Electro Mechanical System (MEMS) accelerometer are derived and solved. The stiffness constant is determined by the strain energy and Castigliano’s displacement theorem, whereas the effective mass is determined by the Rayleigh principle. The stiffness constant and the effective mass are solved separately by components and then combined by using the superposition method. The results obtained by the derived equations agree well when compared with the finite element results for several thickness values. The governing equations derived in this paper can be used to predict the natural frequencies and sensitivity of the MEMS-accelerometer.},
	issn = {0039-2480},	pages = {517-525},	doi = {10.5545/sv-jme.2009.151},
	url = {https://www.sv-jme.eu/sl/article/theoretical-analysis-of-stiffness-constant-and-effective-mass-for-a-round-folded-beam-in-mems-accelerometer/}
}
Wong, W.,Azid, I.,Yeop Majlis, B.
2011 June 57. Theoretical Analysis of Stiffness Constant and Effective Mass for a Round-Folded Beam in MEMS Accelerometer. Strojniški vestnik - Journal of Mechanical Engineering. [Online] 57:6
%A Wong, Wai Chi 
%A Azid, Ishak Abdul 
%A Yeop Majlis, Burhanuddin 
%D 2011
%T Theoretical Analysis of Stiffness Constant and Effective Mass for a Round-Folded Beam in MEMS Accelerometer
%B 2011
%9 effective mass; folded beam; MEMS-accelerometer; stiffness constant; strain energy
%! Theoretical Analysis of Stiffness Constant and Effective Mass for a Round-Folded Beam in MEMS Accelerometer
%K effective mass; folded beam; MEMS-accelerometer; stiffness constant; strain energy
%X In this paper, the governing equations of stiffness constant and effective mass for a round folded suspension beam in Micro-Electro Mechanical System (MEMS) accelerometer are derived and solved. The stiffness constant is determined by the strain energy and Castigliano’s displacement theorem, whereas the effective mass is determined by the Rayleigh principle. The stiffness constant and the effective mass are solved separately by components and then combined by using the superposition method. The results obtained by the derived equations agree well when compared with the finite element results for several thickness values. The governing equations derived in this paper can be used to predict the natural frequencies and sensitivity of the MEMS-accelerometer.
%U https://www.sv-jme.eu/sl/article/theoretical-analysis-of-stiffness-constant-and-effective-mass-for-a-round-folded-beam-in-mems-accelerometer/
%0 Journal Article
%R 10.5545/sv-jme.2009.151
%& 517
%P 9
%J Strojniški vestnik - Journal of Mechanical Engineering
%V 57
%N 6
%@ 0039-2480
%8 2018-06-28
%7 2018-06-28
Wong, Wai Chi, Ishak Abdul  Azid, & Burhanuddin  Yeop Majlis.
"Theoretical Analysis of Stiffness Constant and Effective Mass for a Round-Folded Beam in MEMS Accelerometer." Strojniški vestnik - Journal of Mechanical Engineering [Online], 57.6 (2011): 517-525. Web.  02 Dec. 2022
TY  - JOUR
AU  - Wong, Wai Chi 
AU  - Azid, Ishak Abdul 
AU  - Yeop Majlis, Burhanuddin 
PY  - 2011
TI  - Theoretical Analysis of Stiffness Constant and Effective Mass for a Round-Folded Beam in MEMS Accelerometer
JF  - Strojniški vestnik - Journal of Mechanical Engineering
DO  - 10.5545/sv-jme.2009.151
KW  - effective mass; folded beam; MEMS-accelerometer; stiffness constant; strain energy
N2  - In this paper, the governing equations of stiffness constant and effective mass for a round folded suspension beam in Micro-Electro Mechanical System (MEMS) accelerometer are derived and solved. The stiffness constant is determined by the strain energy and Castigliano’s displacement theorem, whereas the effective mass is determined by the Rayleigh principle. The stiffness constant and the effective mass are solved separately by components and then combined by using the superposition method. The results obtained by the derived equations agree well when compared with the finite element results for several thickness values. The governing equations derived in this paper can be used to predict the natural frequencies and sensitivity of the MEMS-accelerometer.
UR  - https://www.sv-jme.eu/sl/article/theoretical-analysis-of-stiffness-constant-and-effective-mass-for-a-round-folded-beam-in-mems-accelerometer/
@article{{sv-jme}{sv-jme.2009.151},
	author = {Wong, W., Azid, I., Yeop Majlis, B.},
	title = {Theoretical Analysis of Stiffness Constant and Effective Mass for a Round-Folded Beam in MEMS Accelerometer},
	journal = {Strojniški vestnik - Journal of Mechanical Engineering},
	volume = {57},
	number = {6},
	year = {2011},
	doi = {10.5545/sv-jme.2009.151},
	url = {https://www.sv-jme.eu/sl/article/theoretical-analysis-of-stiffness-constant-and-effective-mass-for-a-round-folded-beam-in-mems-accelerometer/}
}
TY  - JOUR
AU  - Wong, Wai Chi 
AU  - Azid, Ishak Abdul 
AU  - Yeop Majlis, Burhanuddin 
PY  - 2018/06/28
TI  - Theoretical Analysis of Stiffness Constant and Effective Mass for a Round-Folded Beam in MEMS Accelerometer
JF  - Strojniški vestnik - Journal of Mechanical Engineering; Vol 57, No 6 (2011): Strojniški vestnik - Journal of Mechanical Engineering
DO  - 10.5545/sv-jme.2009.151
KW  - effective mass, folded beam, MEMS-accelerometer, stiffness constant, strain energy
N2  - In this paper, the governing equations of stiffness constant and effective mass for a round folded suspension beam in Micro-Electro Mechanical System (MEMS) accelerometer are derived and solved. The stiffness constant is determined by the strain energy and Castigliano’s displacement theorem, whereas the effective mass is determined by the Rayleigh principle. The stiffness constant and the effective mass are solved separately by components and then combined by using the superposition method. The results obtained by the derived equations agree well when compared with the finite element results for several thickness values. The governing equations derived in this paper can be used to predict the natural frequencies and sensitivity of the MEMS-accelerometer.
UR  - https://www.sv-jme.eu/sl/article/theoretical-analysis-of-stiffness-constant-and-effective-mass-for-a-round-folded-beam-in-mems-accelerometer/
Wong, Wai Chi, Azid, Ishak Abdul, AND Yeop Majlis, Burhanuddin.
"Theoretical Analysis of Stiffness Constant and Effective Mass for a Round-Folded Beam in MEMS Accelerometer" Strojniški vestnik - Journal of Mechanical Engineering [Online], Volume 57 Number 6 (28 June 2018)

Avtorji

Inštitucije

  • School of Mechanical Engineering, Engineering Campus, Universiti Sains Malaysia, 14300 Nibong Tebal, Seberang Perai Selatan, Pulau Pinang 1
  • Institute of Microengineering and Nanoelectronic, Kebangsaan University 2

Informacije o papirju

Strojniški vestnik - Journal of Mechanical Engineering 57(2011)6, 517-525
© The Authors, CC-BY 4.0 Int. Change in copyright policy from 2022, Jan 1st.

https://doi.org/10.5545/sv-jme.2009.151

In this paper, the governing equations of stiffness constant and effective mass for a round folded suspension beam in Micro-Electro Mechanical System (MEMS) accelerometer are derived and solved. The stiffness constant is determined by the strain energy and Castigliano’s displacement theorem, whereas the effective mass is determined by the Rayleigh principle. The stiffness constant and the effective mass are solved separately by components and then combined by using the superposition method. The results obtained by the derived equations agree well when compared with the finite element results for several thickness values. The governing equations derived in this paper can be used to predict the natural frequencies and sensitivity of the MEMS-accelerometer.

effective mass; folded beam; MEMS-accelerometer; stiffness constant; strain energy