A detailed analysis of resonant frequency and sensitivity of flexural modes of an atomic force microscope cantilevers with sidewall probe based on a nonlocal elasticity theory

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ABBASI, Mohammad ;KARAMI MOHAMMADI, Ardeshir .
A detailed analysis of resonant frequency and sensitivity of flexural modes of an atomic force microscope cantilevers with sidewall probe based on a nonlocal elasticity theory. 
Strojniški vestnik - Journal of Mechanical Engineering, [S.l.], v. 60, n.3, p. 179-186, june 2018. 
ISSN 0039-2480.
Available at: <https://www.sv-jme.eu/sl/article/a-detailed-analysis-of-resonant-frequency-and-sensitivity-of-flexural-modes-of-an-atomic-force-microscope-cantilevers-with-sidewall-probe-based-on-a-nonlocal-elasticity-theory/>. Date accessed: 16 apr. 2021. 
doi:http://dx.doi.org/10.5545/sv-jme.2013.1361.
Abbasi, M., & Karami Mohammadi, A.
(2014).
A detailed analysis of resonant frequency and sensitivity of flexural modes of an atomic force microscope cantilevers with sidewall probe based on a nonlocal elasticity theory.
Strojniški vestnik - Journal of Mechanical Engineering, 60(3), 179-186.
doi:http://dx.doi.org/10.5545/sv-jme.2013.1361
@article{sv-jmesv-jme.2013.1361,
	author = {Mohammad  Abbasi and Ardeshir  Karami Mohammadi},
	title = {A detailed analysis of resonant frequency and sensitivity of flexural modes of an atomic force microscope cantilevers with sidewall probe based on a nonlocal elasticity theory},
	journal = {Strojniški vestnik - Journal of Mechanical Engineering},
	volume = {60},
	number = {3},
	year = {2014},
	keywords = {atomic force microscope, assembled cantilever probe, nonlocal elasticity theory, size dependent},
	abstract = {In this paper, utilizing a nonlocal elasticity theory, the resonant frequency and sensitivities of an atomic force microscope (AFM) with assembled cantilever probe (ACP) are studied. This ACP comprises a horizontal cantilever and a vertical extension, and a tip located at the free end of the extension, which makes the AFM capable of topography at sidewalls of microstructures. First, the governing differential equations of motion and boundary conditions for flexural vibration are obtained by a combination of the basic equations of nonlocal elasticity theory and Hamilton’s principle. Afterwards, a closed-form expression for the sensitivity of vibration modes has been obtained using the relationship between the resonant frequency and contact stiffness between tip and sample. This analysis provide a better representation of the vibration behavior of AFM cantilever with sidewall probe where the effects of small scale are significant. The results of the nonlocal theory are compared to those of classical beam theory. The evaluation shows that the resonant frequency and sensitivity of the proposed ACP are size dependent especially when the contact stiffness are high},
	issn = {0039-2480},	pages = {179-186},	doi = {10.5545/sv-jme.2013.1361},
	url = {https://www.sv-jme.eu/sl/article/a-detailed-analysis-of-resonant-frequency-and-sensitivity-of-flexural-modes-of-an-atomic-force-microscope-cantilevers-with-sidewall-probe-based-on-a-nonlocal-elasticity-theory/}
}
Abbasi, M.,Karami Mohammadi, A.
2014 June 60. A detailed analysis of resonant frequency and sensitivity of flexural modes of an atomic force microscope cantilevers with sidewall probe based on a nonlocal elasticity theory. Strojniški vestnik - Journal of Mechanical Engineering. [Online] 60:3
%A Abbasi, Mohammad 
%A Karami Mohammadi, Ardeshir 
%D 2014
%T A detailed analysis of resonant frequency and sensitivity of flexural modes of an atomic force microscope cantilevers with sidewall probe based on a nonlocal elasticity theory
%B 2014
%9 atomic force microscope, assembled cantilever probe, nonlocal elasticity theory, size dependent
%! A detailed analysis of resonant frequency and sensitivity of flexural modes of an atomic force microscope cantilevers with sidewall probe based on a nonlocal elasticity theory
%K atomic force microscope, assembled cantilever probe, nonlocal elasticity theory, size dependent
%X In this paper, utilizing a nonlocal elasticity theory, the resonant frequency and sensitivities of an atomic force microscope (AFM) with assembled cantilever probe (ACP) are studied. This ACP comprises a horizontal cantilever and a vertical extension, and a tip located at the free end of the extension, which makes the AFM capable of topography at sidewalls of microstructures. First, the governing differential equations of motion and boundary conditions for flexural vibration are obtained by a combination of the basic equations of nonlocal elasticity theory and Hamilton’s principle. Afterwards, a closed-form expression for the sensitivity of vibration modes has been obtained using the relationship between the resonant frequency and contact stiffness between tip and sample. This analysis provide a better representation of the vibration behavior of AFM cantilever with sidewall probe where the effects of small scale are significant. The results of the nonlocal theory are compared to those of classical beam theory. The evaluation shows that the resonant frequency and sensitivity of the proposed ACP are size dependent especially when the contact stiffness are high
%U https://www.sv-jme.eu/sl/article/a-detailed-analysis-of-resonant-frequency-and-sensitivity-of-flexural-modes-of-an-atomic-force-microscope-cantilevers-with-sidewall-probe-based-on-a-nonlocal-elasticity-theory/
%0 Journal Article
%R 10.5545/sv-jme.2013.1361
%& 179
%P 8
%J Strojniški vestnik - Journal of Mechanical Engineering
%V 60
%N 3
%@ 0039-2480
%8 2018-06-28
%7 2018-06-28
Abbasi, Mohammad, & Ardeshir  Karami Mohammadi.
"A detailed analysis of resonant frequency and sensitivity of flexural modes of an atomic force microscope cantilevers with sidewall probe based on a nonlocal elasticity theory." Strojniški vestnik - Journal of Mechanical Engineering [Online], 60.3 (2014): 179-186. Web.  16 Apr. 2021
TY  - JOUR
AU  - Abbasi, Mohammad 
AU  - Karami Mohammadi, Ardeshir 
PY  - 2014
TI  - A detailed analysis of resonant frequency and sensitivity of flexural modes of an atomic force microscope cantilevers with sidewall probe based on a nonlocal elasticity theory
JF  - Strojniški vestnik - Journal of Mechanical Engineering
DO  - 10.5545/sv-jme.2013.1361
KW  - atomic force microscope, assembled cantilever probe, nonlocal elasticity theory, size dependent
N2  - In this paper, utilizing a nonlocal elasticity theory, the resonant frequency and sensitivities of an atomic force microscope (AFM) with assembled cantilever probe (ACP) are studied. This ACP comprises a horizontal cantilever and a vertical extension, and a tip located at the free end of the extension, which makes the AFM capable of topography at sidewalls of microstructures. First, the governing differential equations of motion and boundary conditions for flexural vibration are obtained by a combination of the basic equations of nonlocal elasticity theory and Hamilton’s principle. Afterwards, a closed-form expression for the sensitivity of vibration modes has been obtained using the relationship between the resonant frequency and contact stiffness between tip and sample. This analysis provide a better representation of the vibration behavior of AFM cantilever with sidewall probe where the effects of small scale are significant. The results of the nonlocal theory are compared to those of classical beam theory. The evaluation shows that the resonant frequency and sensitivity of the proposed ACP are size dependent especially when the contact stiffness are high
UR  - https://www.sv-jme.eu/sl/article/a-detailed-analysis-of-resonant-frequency-and-sensitivity-of-flexural-modes-of-an-atomic-force-microscope-cantilevers-with-sidewall-probe-based-on-a-nonlocal-elasticity-theory/
@article{{sv-jme}{sv-jme.2013.1361},
	author = {Abbasi, M., Karami Mohammadi, A.},
	title = {A detailed analysis of resonant frequency and sensitivity of flexural modes of an atomic force microscope cantilevers with sidewall probe based on a nonlocal elasticity theory},
	journal = {Strojniški vestnik - Journal of Mechanical Engineering},
	volume = {60},
	number = {3},
	year = {2014},
	doi = {10.5545/sv-jme.2013.1361},
	url = {https://www.sv-jme.eu/sl/article/a-detailed-analysis-of-resonant-frequency-and-sensitivity-of-flexural-modes-of-an-atomic-force-microscope-cantilevers-with-sidewall-probe-based-on-a-nonlocal-elasticity-theory/}
}
TY  - JOUR
AU  - Abbasi, Mohammad 
AU  - Karami Mohammadi, Ardeshir 
PY  - 2018/06/28
TI  - A detailed analysis of resonant frequency and sensitivity of flexural modes of an atomic force microscope cantilevers with sidewall probe based on a nonlocal elasticity theory
JF  - Strojniški vestnik - Journal of Mechanical Engineering; Vol 60, No 3 (2014): Strojniški vestnik - Journal of Mechanical Engineering
DO  - 10.5545/sv-jme.2013.1361
KW  - atomic force microscope, assembled cantilever probe, nonlocal elasticity theory, size dependent
N2  - In this paper, utilizing a nonlocal elasticity theory, the resonant frequency and sensitivities of an atomic force microscope (AFM) with assembled cantilever probe (ACP) are studied. This ACP comprises a horizontal cantilever and a vertical extension, and a tip located at the free end of the extension, which makes the AFM capable of topography at sidewalls of microstructures. First, the governing differential equations of motion and boundary conditions for flexural vibration are obtained by a combination of the basic equations of nonlocal elasticity theory and Hamilton’s principle. Afterwards, a closed-form expression for the sensitivity of vibration modes has been obtained using the relationship between the resonant frequency and contact stiffness between tip and sample. This analysis provide a better representation of the vibration behavior of AFM cantilever with sidewall probe where the effects of small scale are significant. The results of the nonlocal theory are compared to those of classical beam theory. The evaluation shows that the resonant frequency and sensitivity of the proposed ACP are size dependent especially when the contact stiffness are high
UR  - https://www.sv-jme.eu/sl/article/a-detailed-analysis-of-resonant-frequency-and-sensitivity-of-flexural-modes-of-an-atomic-force-microscope-cantilevers-with-sidewall-probe-based-on-a-nonlocal-elasticity-theory/
Abbasi, Mohammad, AND Karami Mohammadi, Ardeshir.
"A detailed analysis of resonant frequency and sensitivity of flexural modes of an atomic force microscope cantilevers with sidewall probe based on a nonlocal elasticity theory" Strojniški vestnik - Journal of Mechanical Engineering [Online], Volume 60 Number 3 (28 June 2018)

Avtorji

Inštitucije

  • Shahrood University of Technology, School of Mechanical Engineering, Shahrood, Iran 1

Informacije o papirju

Strojniški vestnik - Journal of Mechanical Engineering 60(2014)3, 179-186

https://doi.org/10.5545/sv-jme.2013.1361

In this paper, utilizing a nonlocal elasticity theory, the resonant frequency and sensitivities of an atomic force microscope (AFM) with assembled cantilever probe (ACP) are studied. This ACP comprises a horizontal cantilever and a vertical extension, and a tip located at the free end of the extension, which makes the AFM capable of topography at sidewalls of microstructures. First, the governing differential equations of motion and boundary conditions for flexural vibration are obtained by a combination of the basic equations of nonlocal elasticity theory and Hamilton’s principle. Afterwards, a closed-form expression for the sensitivity of vibration modes has been obtained using the relationship between the resonant frequency and contact stiffness between tip and sample. This analysis provide a better representation of the vibration behavior of AFM cantilever with sidewall probe where the effects of small scale are significant. The results of the nonlocal theory are compared to those of classical beam theory. The evaluation shows that the resonant frequency and sensitivity of the proposed ACP are size dependent especially when the contact stiffness are high

atomic force microscope, assembled cantilever probe, nonlocal elasticity theory, size dependent