Characterizing effective d31 values for PZT from the nonlinear oscillations of clamped-clamped micro- resonators

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DICK, Andrew J..
Characterizing effective d31 values for PZT from the nonlinear oscillations of clamped-clamped micro- resonators. 
Strojniški vestnik - Journal of Mechanical Engineering, [S.l.], v. 59, n.1, p. 50-55, june 2018. 
ISSN 0039-2480.
Available at: <https://www.sv-jme.eu/article/characterizing-effective-d31-values-for-pzt-from-the-nonlinear-oscillations-of-clamped-clamped-micro-resonators/>. Date accessed: 28 mar. 2024. 
doi:http://dx.doi.org/10.5545/sv-jme.2012.673.
Dick, A.
(2013).
Characterizing effective d31 values for PZT from the nonlinear oscillations of clamped-clamped micro- resonators.
Strojniški vestnik - Journal of Mechanical Engineering, 59(1), 50-55.
doi:http://dx.doi.org/10.5545/sv-jme.2012.673
@article{sv-jmesv-jme.2012.673,
	author = {Andrew J. Dick},
	title = {Characterizing effective d31 values for PZT from the nonlinear oscillations of clamped-clamped micro- resonators},
	journal = {Strojniški vestnik - Journal of Mechanical Engineering},
	volume = {59},
	number = {1},
	year = {2013},
	keywords = {Piezoelectric material; micro-beam resonator; nonlinear oscillations},
	abstract = {In order to accurately predict the performance of micro-electromechanical systems which use piezoelectric material, precise knowledge of the piezoelectric coefficients is critical. Current material characterization methods rely on either simple structures restricted to small amplitude, linear oscillations or consider the piezoelectric material separate from the specific micro-scale device. A method is proposed for the characterization of the effective transverse piezoelectric coefficient d31 of lead zirconate titanate in a clamped-clamped micro-beam resonator experiencing nonlinear oscillations. Parameter trends identified by using a parametric identification scheme are analyzed and an approach is presented to calculate the linear piezoelectric coefficient. This method utilizes the relationship between a DC bias added to the excitation signal and the frequency shift experienced by the nonlinear response behavior. Through an additional numerical study, the sensitivity of the results to changes in the device length is identified and all data sets provide the same coefficient value when a length variation of less than 2% is allowed.},
	issn = {0039-2480},	pages = {50-55},	doi = {10.5545/sv-jme.2012.673},
	url = {https://www.sv-jme.eu/article/characterizing-effective-d31-values-for-pzt-from-the-nonlinear-oscillations-of-clamped-clamped-micro-resonators/}
}
Dick, A.
2013 June 59. Characterizing effective d31 values for PZT from the nonlinear oscillations of clamped-clamped micro- resonators. Strojniški vestnik - Journal of Mechanical Engineering. [Online] 59:1
%A Dick, Andrew J.
%D 2013
%T Characterizing effective d31 values for PZT from the nonlinear oscillations of clamped-clamped micro- resonators
%B 2013
%9 Piezoelectric material; micro-beam resonator; nonlinear oscillations
%! Characterizing effective d31 values for PZT from the nonlinear oscillations of clamped-clamped micro- resonators
%K Piezoelectric material; micro-beam resonator; nonlinear oscillations
%X In order to accurately predict the performance of micro-electromechanical systems which use piezoelectric material, precise knowledge of the piezoelectric coefficients is critical. Current material characterization methods rely on either simple structures restricted to small amplitude, linear oscillations or consider the piezoelectric material separate from the specific micro-scale device. A method is proposed for the characterization of the effective transverse piezoelectric coefficient d31 of lead zirconate titanate in a clamped-clamped micro-beam resonator experiencing nonlinear oscillations. Parameter trends identified by using a parametric identification scheme are analyzed and an approach is presented to calculate the linear piezoelectric coefficient. This method utilizes the relationship between a DC bias added to the excitation signal and the frequency shift experienced by the nonlinear response behavior. Through an additional numerical study, the sensitivity of the results to changes in the device length is identified and all data sets provide the same coefficient value when a length variation of less than 2% is allowed.
%U https://www.sv-jme.eu/article/characterizing-effective-d31-values-for-pzt-from-the-nonlinear-oscillations-of-clamped-clamped-micro-resonators/
%0 Journal Article
%R 10.5545/sv-jme.2012.673
%& 50
%P 6
%J Strojniški vestnik - Journal of Mechanical Engineering
%V 59
%N 1
%@ 0039-2480
%8 2018-06-28
%7 2018-06-28
Dick, Andrew.
"Characterizing effective d31 values for PZT from the nonlinear oscillations of clamped-clamped micro- resonators." Strojniški vestnik - Journal of Mechanical Engineering [Online], 59.1 (2013): 50-55. Web.  28 Mar. 2024
TY  - JOUR
AU  - Dick, Andrew J.
PY  - 2013
TI  - Characterizing effective d31 values for PZT from the nonlinear oscillations of clamped-clamped micro- resonators
JF  - Strojniški vestnik - Journal of Mechanical Engineering
DO  - 10.5545/sv-jme.2012.673
KW  - Piezoelectric material; micro-beam resonator; nonlinear oscillations
N2  - In order to accurately predict the performance of micro-electromechanical systems which use piezoelectric material, precise knowledge of the piezoelectric coefficients is critical. Current material characterization methods rely on either simple structures restricted to small amplitude, linear oscillations or consider the piezoelectric material separate from the specific micro-scale device. A method is proposed for the characterization of the effective transverse piezoelectric coefficient d31 of lead zirconate titanate in a clamped-clamped micro-beam resonator experiencing nonlinear oscillations. Parameter trends identified by using a parametric identification scheme are analyzed and an approach is presented to calculate the linear piezoelectric coefficient. This method utilizes the relationship between a DC bias added to the excitation signal and the frequency shift experienced by the nonlinear response behavior. Through an additional numerical study, the sensitivity of the results to changes in the device length is identified and all data sets provide the same coefficient value when a length variation of less than 2% is allowed.
UR  - https://www.sv-jme.eu/article/characterizing-effective-d31-values-for-pzt-from-the-nonlinear-oscillations-of-clamped-clamped-micro-resonators/
@article{{sv-jme}{sv-jme.2012.673},
	author = {Dick, A.},
	title = {Characterizing effective d31 values for PZT from the nonlinear oscillations of clamped-clamped micro- resonators},
	journal = {Strojniški vestnik - Journal of Mechanical Engineering},
	volume = {59},
	number = {1},
	year = {2013},
	doi = {10.5545/sv-jme.2012.673},
	url = {https://www.sv-jme.eu/article/characterizing-effective-d31-values-for-pzt-from-the-nonlinear-oscillations-of-clamped-clamped-micro-resonators/}
}
TY  - JOUR
AU  - Dick, Andrew J.
PY  - 2018/06/28
TI  - Characterizing effective d31 values for PZT from the nonlinear oscillations of clamped-clamped micro- resonators
JF  - Strojniški vestnik - Journal of Mechanical Engineering; Vol 59, No 1 (2013): Strojniški vestnik - Journal of Mechanical Engineering
DO  - 10.5545/sv-jme.2012.673
KW  - Piezoelectric material, micro-beam resonator, nonlinear oscillations
N2  - In order to accurately predict the performance of micro-electromechanical systems which use piezoelectric material, precise knowledge of the piezoelectric coefficients is critical. Current material characterization methods rely on either simple structures restricted to small amplitude, linear oscillations or consider the piezoelectric material separate from the specific micro-scale device. A method is proposed for the characterization of the effective transverse piezoelectric coefficient d31 of lead zirconate titanate in a clamped-clamped micro-beam resonator experiencing nonlinear oscillations. Parameter trends identified by using a parametric identification scheme are analyzed and an approach is presented to calculate the linear piezoelectric coefficient. This method utilizes the relationship between a DC bias added to the excitation signal and the frequency shift experienced by the nonlinear response behavior. Through an additional numerical study, the sensitivity of the results to changes in the device length is identified and all data sets provide the same coefficient value when a length variation of less than 2% is allowed.
UR  - https://www.sv-jme.eu/article/characterizing-effective-d31-values-for-pzt-from-the-nonlinear-oscillations-of-clamped-clamped-micro-resonators/
Dick, Andrew"Characterizing effective d31 values for PZT from the nonlinear oscillations of clamped-clamped micro- resonators" Strojniški vestnik - Journal of Mechanical Engineering [Online], Volume 59 Number 1 (28 June 2018)

Authors

Affiliations

  • Rice University, Department of Mechanical Engineering and Materials Science, Nonlinear Phenomena Laboratory, USA 1

Paper's information

Strojniški vestnik - Journal of Mechanical Engineering 59(2013)1, 50-55
© The Authors, CC-BY 4.0 Int. Change in copyright policy from 2022, Jan 1st.

https://doi.org/10.5545/sv-jme.2012.673

In order to accurately predict the performance of micro-electromechanical systems which use piezoelectric material, precise knowledge of the piezoelectric coefficients is critical. Current material characterization methods rely on either simple structures restricted to small amplitude, linear oscillations or consider the piezoelectric material separate from the specific micro-scale device. A method is proposed for the characterization of the effective transverse piezoelectric coefficient d31 of lead zirconate titanate in a clamped-clamped micro-beam resonator experiencing nonlinear oscillations. Parameter trends identified by using a parametric identification scheme are analyzed and an approach is presented to calculate the linear piezoelectric coefficient. This method utilizes the relationship between a DC bias added to the excitation signal and the frequency shift experienced by the nonlinear response behavior. Through an additional numerical study, the sensitivity of the results to changes in the device length is identified and all data sets provide the same coefficient value when a length variation of less than 2% is allowed.

Piezoelectric material; micro-beam resonator; nonlinear oscillations