Integrated Design of Mycro-Electro-Mechanical Systems

871 Views
670 Downloads
Export citation: ABNT
MUSEAU, Matthieu ;MASCLET, Cedric .
Integrated Design of Mycro-Electro-Mechanical Systems. 
Strojniški vestnik - Journal of Mechanical Engineering, [S.l.], v. 52, n.7-8, p. 506-514, august 2017. 
ISSN 0039-2480.
Available at: <https://www.sv-jme.eu/article/integrated-design-of-mycro-electro-mechanical-systems/>. Date accessed: 17 apr. 2021. 
doi:http://dx.doi.org/.
Museau, M., & Masclet, C.
(2006).
Integrated Design of Mycro-Electro-Mechanical Systems.
Strojniški vestnik - Journal of Mechanical Engineering, 52(7-8), 506-514.
doi:http://dx.doi.org/
@article{.,
	author = {Matthieu  Museau and Cedric  Masclet},
	title = {Integrated Design of Mycro-Electro-Mechanical Systems},
	journal = {Strojniški vestnik - Journal of Mechanical Engineering},
	volume = {52},
	number = {7-8},
	year = {2006},
	keywords = {MEMS; DFM; manufacturing constraints; design methodology; },
	abstract = {This paper is a first attempt to qualify the design process in the field of micro-electro-mechanical systems products. Through this study we try to analyse how the issue of manufacturability is addressed. This requires an understanding of the specificities of the manufacturing process involved in the realization of these products (we focus on a process derived from the electronics industry). Then we look at the main design methodologies to understand how the manufacturing can be taken into account. Computer-aided tools associated to these methodologies are presented at the same time. Finally, we conclude on the need for specifications for the design methodology that would provide designers with greater independence from manufacturing constraints.},
	issn = {0039-2480},	pages = {506-514},	doi = {},
	url = {https://www.sv-jme.eu/article/integrated-design-of-mycro-electro-mechanical-systems/}
}
Museau, M.,Masclet, C.
2006 August 52. Integrated Design of Mycro-Electro-Mechanical Systems. Strojniški vestnik - Journal of Mechanical Engineering. [Online] 52:7-8
%A Museau, Matthieu 
%A Masclet, Cedric 
%D 2006
%T Integrated Design of Mycro-Electro-Mechanical Systems
%B 2006
%9 MEMS; DFM; manufacturing constraints; design methodology; 
%! Integrated Design of Mycro-Electro-Mechanical Systems
%K MEMS; DFM; manufacturing constraints; design methodology; 
%X This paper is a first attempt to qualify the design process in the field of micro-electro-mechanical systems products. Through this study we try to analyse how the issue of manufacturability is addressed. This requires an understanding of the specificities of the manufacturing process involved in the realization of these products (we focus on a process derived from the electronics industry). Then we look at the main design methodologies to understand how the manufacturing can be taken into account. Computer-aided tools associated to these methodologies are presented at the same time. Finally, we conclude on the need for specifications for the design methodology that would provide designers with greater independence from manufacturing constraints.
%U https://www.sv-jme.eu/article/integrated-design-of-mycro-electro-mechanical-systems/
%0 Journal Article
%R 
%& 506
%P 9
%J Strojniški vestnik - Journal of Mechanical Engineering
%V 52
%N 7-8
%@ 0039-2480
%8 2017-08-18
%7 2017-08-18
Museau, Matthieu, & Cedric  Masclet.
"Integrated Design of Mycro-Electro-Mechanical Systems." Strojniški vestnik - Journal of Mechanical Engineering [Online], 52.7-8 (2006): 506-514. Web.  17 Apr. 2021
TY  - JOUR
AU  - Museau, Matthieu 
AU  - Masclet, Cedric 
PY  - 2006
TI  - Integrated Design of Mycro-Electro-Mechanical Systems
JF  - Strojniški vestnik - Journal of Mechanical Engineering
DO  - 
KW  - MEMS; DFM; manufacturing constraints; design methodology; 
N2  - This paper is a first attempt to qualify the design process in the field of micro-electro-mechanical systems products. Through this study we try to analyse how the issue of manufacturability is addressed. This requires an understanding of the specificities of the manufacturing process involved in the realization of these products (we focus on a process derived from the electronics industry). Then we look at the main design methodologies to understand how the manufacturing can be taken into account. Computer-aided tools associated to these methodologies are presented at the same time. Finally, we conclude on the need for specifications for the design methodology that would provide designers with greater independence from manufacturing constraints.
UR  - https://www.sv-jme.eu/article/integrated-design-of-mycro-electro-mechanical-systems/
@article{{}{.},
	author = {Museau, M., Masclet, C.},
	title = {Integrated Design of Mycro-Electro-Mechanical Systems},
	journal = {Strojniški vestnik - Journal of Mechanical Engineering},
	volume = {52},
	number = {7-8},
	year = {2006},
	doi = {},
	url = {https://www.sv-jme.eu/article/integrated-design-of-mycro-electro-mechanical-systems/}
}
TY  - JOUR
AU  - Museau, Matthieu 
AU  - Masclet, Cedric 
PY  - 2017/08/18
TI  - Integrated Design of Mycro-Electro-Mechanical Systems
JF  - Strojniški vestnik - Journal of Mechanical Engineering; Vol 52, No 7-8 (2006): Strojniški vestnik - Journal of Mechanical Engineering
DO  - 
KW  - MEMS, DFM, manufacturing constraints, design methodology, 
N2  - This paper is a first attempt to qualify the design process in the field of micro-electro-mechanical systems products. Through this study we try to analyse how the issue of manufacturability is addressed. This requires an understanding of the specificities of the manufacturing process involved in the realization of these products (we focus on a process derived from the electronics industry). Then we look at the main design methodologies to understand how the manufacturing can be taken into account. Computer-aided tools associated to these methodologies are presented at the same time. Finally, we conclude on the need for specifications for the design methodology that would provide designers with greater independence from manufacturing constraints.
UR  - https://www.sv-jme.eu/article/integrated-design-of-mycro-electro-mechanical-systems/
Museau, Matthieu, AND Masclet, Cedric.
"Integrated Design of Mycro-Electro-Mechanical Systems" Strojniški vestnik - Journal of Mechanical Engineering [Online], Volume 52 Number 7-8 (18 August 2017)

Authors

Affiliations

  • University of Grenoble, France
  • University of Grenoble, France

Paper's information

Strojniški vestnik - Journal of Mechanical Engineering 52(2006)7-8, 506-514

This paper is a first attempt to qualify the design process in the field of micro-electro-mechanical systems products. Through this study we try to analyse how the issue of manufacturability is addressed. This requires an understanding of the specificities of the manufacturing process involved in the realization of these products (we focus on a process derived from the electronics industry). Then we look at the main design methodologies to understand how the manufacturing can be taken into account. Computer-aided tools associated to these methodologies are presented at the same time. Finally, we conclude on the need for specifications for the design methodology that would provide designers with greater independence from manufacturing constraints.

MEMS; DFM; manufacturing constraints; design methodology;